Load Port Module

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Wafer Transfer System
N2 Purge LPM

N2 Purge LPM (KOREL 550P)

  Features

  • N2 Purging into the FOUP
  • Flow control by MFC
  • Host communication of N2 flow rate and O2 concentration is available for monitoring
  • Compatible with extra N2 Purge/Stage Kit  (Easy Maintenance)

  Specifications

Item

Specification

H/W

Purge Method

Bottom Purge

Purge Port Q’ty

4 Port (3in / 1 out)

Purge Flow Range

Max. 300L/min

(0~100LPM / 1Nozzle)

MFC Q’ty

2 ea (200LPM 1ea/ 100LPM 1ea)

Control

Purge Time

 Purge setting per sequence

Purge flow rate

3 steps control per each nozzle

Port

3 in 1out

1 in 1out

N2 Valve

On/Off

FOUP sensing

2/4 Port FOUP recognition

Safety

O2 concentration

 Below 19.5%

O2 concentration monitoring


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