Wafer Transfer Robot

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Wafer Transfer System
Atmospheric Robot

Atmospheric Robot

  Features and advantages

  Model S0093

  • Three FOUPs without tracks
  • Horizontal changer mechanism for short wafer swap time
  • Mapping sensor available as an option
  • The modular design of RT unit and elevation unit - Easy maintenance
  • Prepared a new line up for 450mm wafer transfer with improved arm rigidity

  Model S0715

  • High precision robot by TAZMO’s robot production technology
  • Space-saving ATM robot with long time operation
  • Supply to Samsung Electronics and SK Hynix
  • Self diagnostics through real time monitoring
  • Minimum tack time by moving route optimization

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Email : Sales@kosteks.com

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