Item

Specification

Operating Pressure

1.0 * 10-6 Pa(5*10-9Torr)

Axes

6-Axes (R1-R3, T1-T2, Z)

Range of Motion

R-Axis : 860mm

Z-Axis : 145mm

T1-Axis : ± 185 deg

T2-Axis : ± 10 deg

Minimum Turning diameter

Ф 930 mm

Operation speed

R-Axis : 1.1sec (860mm)

Z-Axis : 2.5sec (145mm)

Rotation-Axis : 1.5sec (180deg)

AWC

≤±0.1mm

Weight

About 180 kg

Grease

FOMBLIN YVAC1

Repeatability

R : ± 0.1 mm

T : ± 0.02 deg.

Z : ± 0.1 mm

Motor

AC Servo Motor

(R/T2 : 100W, T1 : 200W, Z : 400W)

Item

Specification

Operating Pressure

1.0 * 10-6 Pa(5*10-9Torr)

Composition

4-Axes (R1-R2, T1, Z1)

Range of Motion

R-Axis : 1050mm

Z-Axis : 105mm

T-Axis : 370deg(±185deg)

Minimum turning diameter

Ф860

Operating time

R-Axis : 1.3sec / 780mm

Z-Axis : 3.5sec / 105mm

T-Axis : 1.5sec / 180deg

AWC

≤ ±0.1 mm

Weight

About 100kg

Grease

FOMBLIN YVAC1

Repeatability

XY : ±0.1mm

Z : ±0.05mm

Motor

AC servo motor

(R1/R2/T/Z:200W)

Item

Specification

Operating Pressure

1.0 * 10-6 Pa(5*10-9Torr)

Composition

5-Axes (R, θ, W1/W2, Z)

Range of Motion

R-Axis : 590mm

Z-Axis : 160mm

Θ-Axis : 730°(±365°)

W1/W2 : : 370°(±185°)

Minimum turning diameter

Ф370

Operating time

R-Axis : 1.6sec

Z-Axis : 3.5sec / 160mm

Θ/W1/W2-Axis : 3.9sec

AWC

≤±0.2mm

Weight

About 120 kg

Grease

FOMBLIN YVAC3

Repeatability

X/Y : ±0.1mm

Z : ±0.05mm

Motor

AC Servo Motor

(R/Θ/Z:200W, W1/W2:50W)