Semiconductor Equipment |
Semiconductor Equipment |
Load Port Module
Home > 제품소개 > Semiconductor Equipment > Wafer Transfer System > Load Port Module > Standard LPM
Wafer Transfer System |
N2 Purge LPM |
Features
Specifications
Item | Specification | |
H/W | Purge Method | Bottom Purge |
Purge Port Q’ty | 4 Port (3in / 1 out) | |
Purge Flow Range | Max. 300L/min (0~100LPM / 1Nozzle) | |
MFC Q’ty | 2 ea (200LPM 1ea/ 100LPM 1ea) | |
Control | Purge Time | Purge setting per sequence |
Purge flow rate | 3 steps control per each nozzle | |
Port | 3 in 1out 1 in 1out | |
N2 Valve | On/Off | |
FOUP sensing | 2/4 Port FOUP recognition | |
Safety | O2 concentration | Below 19.5% O2 concentration monitoring |
코스텍시스템(주) 경기도 평택시 서탄면 방꼬지길 231
TEL : 031-646-1500 FAX : 031-646-1515
Email : Sales@kosteks.com
© 2022 KOSTEK SYSTEMS, INC. All Rights Reserved.
코스텍시스템(주) 대표이사 : 배준호 주소 : 경기도 평택시 서탄면 방꼬지길 231
TEL : 031-646-1500 FAX : 031-646-1515 Email : Sales@kosteks.com
© 2022 KOSTEK SYSTEMS, INC. All Rights Reserved.