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Equipment Front End Module

Home  >  ์ œํ’ˆ์†Œ๊ฐœ  >  Semiconductor Equipment  >  Wafer Transfer System  > EFEM >  N2 Purge EFEM


Wafer Transfer System

N2 PURGE EFEM

  Features

  • Low N2 consumption by excellent sealing and self-circulating
  • N2 circulation through duct & chemical filter
  • O2 concentration monitoring by O2 sensor

์ฝ”์Šคํ…์‹œ์Šคํ…œ(์ฃผ) ๊ฒฝ๊ธฐ๋„ ํ‰ํƒ์‹œ ์„œํƒ„๋ฉด ๋ฐฉ๊ผฌ์ง€๊ธธ 231

TEL : 031-646-1500  FAX : 031-646-1515

Email : Sales@kosteks.com

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