End Effector

GN-Pad

 Features and advantages

• Millions of nanoscale  fuzz on the surface of GN-Pad generates  “Van der Waals force” which enables to grip the wafer stably and the gripping force can be adjustable.
• Remarkably less particles compared to Edge Gripping
• Less damage on the back side of the wafer compared to Vacuum Gripping
• Robot can be used  by maximum speed due to no slip