Equipment Front End Module

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Wafer Transfer System

End Effector


 Features and advantages

  • Millions of nanoscale  fuzz on the surface of GN-Pad generates  “Van der Waals force” which enables to grip the wafer stably and the gripping force can be adjustable.
  • Remarkably less particles compared to Edge Gripping
  • Less damage on the back side of the wafer compared to Vacuum Gripping
  • Robot can be used  by maximum speed due to no slip

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