OPTIMA Series

 OPTIMA 3200

Optima3200은 반도체 fab의 생산성을 향상시키기 위하여 High Throughput과 Small Footprint을 목표로 설계되었습니다.

  Features and Advantages

• Various Configurations up to 6 PMs for 300mm wafer
• Special configuration possible without Transfer Chamber
• Available twin process chamber
• Specially designed vacuum robot for small foot print