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Wafer Transfer System


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OPTIMA Series

 OPTIMA 3200

Optima3200์€ ๋ฐ˜๋„์ฒด fab์˜ ์ƒ์‚ฐ์„ฑ์„ ํ–ฅ์ƒ์‹œํ‚ค๊ธฐ ์œ„ํ•˜์—ฌ High Throughput๊ณผ Small Footprint์„ ๋ชฉํ‘œ๋กœ ์„ค๊ณ„๋˜์—ˆ์Šต๋‹ˆ๋‹ค.

  Features and Advantages

  • Various Configurations up to 6 PMs for 300mm wafer
  • Special configuration possible without Transfer Chamber
  • Available twin process chamber
  • Specially designed vacuum robot for small foot print

์ฝ”์Šคํ…์‹œ์Šคํ…œ(์ฃผ) ๊ฒฝ๊ธฐ๋„ ํ‰ํƒ์‹œ ์„œํƒ„๋ฉด ๋ฐฉ๊ผฌ์ง€๊ธธ 231

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