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Home  >  ์ œํ’ˆ์†Œ๊ฐœ  >  Semiconductor Equipment  > Wafer Transfer System  > EFEM  >  Vacuum Pod Transfer System

Wafer Transfer System


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Vacuum Pod Transfer System

Vacuum Pod Transfer System

๋ฐ˜๋„์ฒด ์†Œ์ž์˜ ์ดˆ๋ฏธ์„ธ ์ง‘์ ํ™”๋กœ ์ธํ•˜์—ฌ ์™ธ๋ถ€์— ๋…ธ์ถœ๋œ ๊ธฐํŒ์˜ ์˜ค์—ผ ๋˜๋Š” ์‚ฐํ™” ๋ฌธ์ œ๋Š” ์ œํ’ˆ์˜ ์ˆ˜์œจ ๋ฐ ๊ณต์ • ๋ถˆ๋Ÿ‰์˜ ์ฃผ์š” ์›์ธ์ด๋ฉฐ,  ์ด๋ฅผ ํ•ด๊ฒฐํ•˜๊ธฐ ์œ„ํ•˜์—ฌ ๊ฐœ๋ฐœ๋œ ์ œํ’ˆ์œผ๋กœ ์™ธ๋ถ€ ๊ณต๊ธฐ๋ฅผ ์™„์ „ํžˆ ์ฐจ๋‹จํ•˜์—ฌ ๊ณต์ • ์ค‘ ์›จ์ดํผ์˜ ์‚ฐํ™” ๋˜๋Š” ์˜ค์—ผ์„ ๋ฐฉ์ง€ํ•  ์ˆ˜ ์žˆ๋Š” ์ง„๊ณต ํ™˜๊ฒฝ์—์„œ ์›จ์ดํผ ์ด์†ก์ด ๊ฐ€๋Šฅํ•œ ์‹œ์Šคํ…œ์ž…๋‹ˆ๋‹ค.


Vacuum Chamber Type

  Features

  • Equipment including EFEM and LPM, to transfer 300mm wafer into Vacuum Pod
  • Vacuum Pod for the prevention of particles contamination and native oxidation
  • In Vacuum Chamber type, Vacuum pod is on the rear of EFEM

Vacuum LPM type

  Features

  • Equipment including EFEM and LPM, to transfer 300mm wafer into Vacuum Pod
  • Vacuum Pod for the prevention of particles contamination and native oxidation
  • In Vacuum LPM type, Vacuum Pod is in front of EFEM for minimizing footprint

์ฝ”์Šคํ…์‹œ์Šคํ…œ(์ฃผ) ๊ฒฝ๊ธฐ๋„ ํ‰ํƒ์‹œ ์„œํƒ„๋ฉด ๋ฐฉ๊ผฌ์ง€๊ธธ 231

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Email : Sales@kosteks.com

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