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Wafer Transfer Robot

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Wafer Transfer System


์ œํ’ˆ์†Œ๊ฐœ


Wafer Transfer Robot

๊ณ ๊ฐ์˜ ์š”๊ตฌ์‚ฌํ•ญ๊ณผ ์—ฐ๊ณ„ํ•œ ์ œํ’ˆ ์„ ํƒ ๋ฐ ๋กœ๋ด‡ ๊ฐœ๋ฐœ ์ƒ๋‹ด์ด ๊ฐ€๋Šฅํ•ฉ๋‹ˆ๋‹ค.



Fast Swap Arm Sets, ์—ฐ์† ํšŒ์ „, ์ ํ•ฉํ•œ Servo ์ œ์–ด์˜ ๊ฒฐํ•ฉ์„ ํ†ตํ•˜์—ฌ ๋†’์€ Throughput๊ณผ ์ƒ์‚ฐ์„ฑ ํ–ฅ์ƒ์„ ๊ฐ€๋Šฅํ•˜๊ฒŒ ํ•ฉ๋‹ˆ๋‹ค. ๋‹ค์–‘ํ•œ ๊ตฌ์„ฑ์—์„œ ์‚ฌ์šฉ ๊ฐ€๋Šฅํ•˜๋ฉฐ ๋‹จ์ผ Cluster Tool์ด๋‚˜ Linear ๊ตฌ์„ฑ์˜ Process Modules ๊ฐ„์— ๋‹จ์ผ ๋˜๋Š” ์—ฌ๋Ÿฌ ์›จ์ดํผ๋ฅผ ๋™์‹œ์— ์•ˆ์ „ํ•˜๊ฒŒ ์ด์†ก(send/return)ํ•  ์ˆ˜ ์žˆ์Šต๋‹ˆ๋‹ค.

  Key Benefits:

  • Maximum throughput and productivity
  • Best-in-class wafer placement repeatability
  • Globally qualified at major fabs
  • Available global installation support, training, and services

์ฝ”์Šคํ…์‹œ์Šคํ…œ(์ฃผ) ๊ฒฝ๊ธฐ๋„ ํ‰ํƒ์‹œ ์„œํƒ„๋ฉด ๋ฐฉ๊ผฌ์ง€๊ธธ 231

TEL : 031-646-1500  FAX : 031-646-1515

Email : Sales@kosteks.com

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