Equipment Front End Module

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Wafer Transfer System



  • Variety atmospheric robots and pre-aligners adoptable single arm, dual arm, flip robot, etc.
  • Passive end effector with GN-PAD →  Prevention of wafer chipping, particle
  • Automatic and accurate wafer alignment with several types of pre-aligners.
  • Easy integration with all processes and metrology equipment.

코스텍시스템(주) 경기도 평택시 서탄면 방꼬지길 231

TEL : 031-646-1500  FAX : 031-646-1515

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