Aligning & Pre-bonding Process     

  Features

• Precise alignment of less than 2um, parallelism/ pressure control, void-free  through bonding in vacuum
• The follow-up process can be stabilized by excellent bonding alignment accuracy

 Results of  Vacuum Aligning & Pre-bonding

  1. Vision Aligning Image

  2. Image  of  Pre-bonding

• Align accuracy : ≤ ±2㎛