Temporary Wafer Bonding System

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Wafer Bonding System

Temporary Wafer Bonding System

Temporary Wafer Bonding System은 Bonding Module 숫자를 증가시켜서 Throughput을 향상시킬 수 있습니다. 임시접착제가 Glue인 경우에는 Spin Coater와 Soft Curing 장치가 구성되고, 임시접착제가 Film Type인 경우는 Lamination module로 대체하면 Wafer Bonding System이 됩니다.

 Temporary Bonding Process Flow : Glue / Film Adhesive

  1. Glue type Adhesive

  2. Film type Adhesive

 Fan-out WLP Bonding Process Flow :  Glue  Adhesive

 Fan-out WLP Bonding Process Flow : Film Adhesive

 Fan-out PLP Bonding Process Flow : Film type Adhesive


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