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Vacuum Cluster System

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Wafer Transfer System

MAXIMA Series

 Maxima - UHV

Maxima UHV๋Š” ๊ณ  ์ง„๊ณต ์ƒํƒœ์—์„œ ๋‚ฎ์€ ์‚ฐ์†Œ ๋†๋„, ์ตœ์†Œ์˜ ๊ฐ€์Šค ๋ฐฉ์ถœ ๋ฐ ์ˆ˜๋ถ„ ํ•จ์œ ๋Ÿ‰ ๋ถ„์œ„๊ธฐ์˜  ํŠน๋ณ„ํ•œ ์›จ์ดํผ ์ด์†ก ํ™˜๊ฒฝ์— ์ ํ•ฉํ•˜๋„๋ก ์„ค๊ณ„๋˜์—ˆ์Šต๋‹ˆ๋‹ค. ๋˜ํ•œ ์›จ์ดํผ ์ฒ˜๋ฆฌ๋Ÿ‰์„ ํฌ๊ฒŒ ํ•˜๊ธฐ ์œ„ํ•˜์—ฌ ์ „์†ก ๋ชจ๋“ˆ์„ 8๊ฐํ˜•(Octagonal Shape)์œผ๋กœ ์—ฐ๊ฒฐํ•˜์—ฌ Tandemํ˜•  ์œผ๋กœ ๊ตฌ์„ฑํ•  ์ˆ˜ ์žˆ์Šต๋‹ˆ๋‹ค.

  Features

  • Single or dual wafer transfer from batch loadlock to single or twin wafer PM

         - Low oxygen content

         - Low outgassing and moisture 


  • Specially designed transfer chamber and  25 wafers batch loadlock
  • Field proven vacuum robot with AWC feature

  Specifications

  • Wafer Placement repeatability : ≤ ± 0.1 mm
  • Base Pressure : 10-3Torr(Available for 10-8Torr)
  • Particle  : ≤ 5 ea @40nm
  • SEMI / MESC Compatible CE Mark and SEMI S2

์ฝ”์Šคํ…์‹œ์Šคํ…œ(์ฃผ) ๊ฒฝ๊ธฐ๋„ ํ‰ํƒ์‹œ ์„œํƒ„๋ฉด ๋ฐฉ๊ผฌ์ง€๊ธธ 231

TEL : 031-646-1500  FAX : 031-646-1515

Email : Sales@kosteks.com

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