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Home  >  ์ œํ’ˆ์†Œ๊ฐœ  >  Semiconductor Equipment  >  Wafer Transfer System  >  Vacuum Cluster System  > Twinstar Series > Twinstar-Tandem 

Wafer Transfer System


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TWINSTAR Series

 Twinstar – Tandem

TWINSTAR-Tandem์€ TWINSTAR ๊ธฐ๋ณธํ˜•์˜ ์„ฑ๋Šฅ๊ณผ ์žฅ์ ์„ ํ™œ์šฉํ•˜๋ฉด์„œ Transfer Module์„ ์ง๋ ฌ๋กœ ์—ฐ๊ฒฐํ•˜์—ฌ ์‹œ๊ฐ„๋‹น ์›จ์ดํผ ์ฒ˜๋ฆฌ๋Ÿ‰์„ ๊ทน๋Œ€ํ™”ํ•  ์ˆ˜ ์žˆ์Šต๋‹ˆ๋‹ค.

  • Inline & Extendable TM
  • Stacked LL
  • 7-axis vacuum robot
  • 5 twin PMs
  • Inline & Detachable TM
  • Stacked LL
  • 7-axis Vacuum Robot
  • 7 twin PMs

์ฝ”์Šคํ…์‹œ์Šคํ…œ(์ฃผ) ๊ฒฝ๊ธฐ๋„ ํ‰ํƒ์‹œ ์„œํƒ„๋ฉด ๋ฐฉ๊ผฌ์ง€๊ธธ 231

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