Item

Specification

Carrier type

SEMI Compliance FOUP

Dimension

472(W) x 493(D) x 1,344.5(H)

Weight

60kg

FOUP Door

Opening Time

Without Mapping

≤ 12 sec

With Mapping

≤ 15 sec

MCBF (Mean Cycles Between Failures

≥ 100,000 Cycles

Cleanliness

ISO Class1 compatible

Electrical interface

+24V DC

Utility requirement

Vacuum

-70 kPa

CDA

0.5 MPa

Option

RF ID Reader, PIO Sensor