Semiconductor Equipment |
Semiconductor Equipment |
Load Port Module
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Wafer Transfer System |
Standard LPM |
Features
Specifications
Item | Specification | ||
Carrier type | SEMI Compliance FOUP | ||
Dimension | 472(W) x 493(D) x 1,344.5(H) | ||
Weight | 60kg | ||
FOUP Door Opening Time | Without Mapping | ≤ 12 sec | |
With Mapping | ≤ 15 sec | ||
MCBF (Mean Cycles Between Failures | ≥ 100,000 Cycles | ||
Cleanliness | ISO Class1 compatible | ||
Electrical interface | +24V DC | ||
Utility requirement | Vacuum | -70 kPa | |
CDA | 0.5 MPa | ||
Option | RF ID Reader, PIO Sensor | ||
코스텍시스템(주) 경기도 평택시 서탄면 방꼬지길 231
TEL : 031-646-1500 FAX : 031-646-1515
Email : Sales@kosteks.com
© 2022 KOSTEK SYSTEMS, INC. All Rights Reserved.
코스텍시스템(주) 대표이사 : 배준호 주소 : 경기도 평택시 서탄면 방꼬지길 231
TEL : 031-646-1500 FAX : 031-646-1515 Email : Sales@kosteks.com
© 2022 KOSTEK SYSTEMS, INC. All Rights Reserved.