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Load Port Module

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Wafer Transfer System
Standard LPM

Standard LPM (KOREL 500)

 Features

  • Compliance with SEMI, CE, and fab requirements
  • High-reliability design delivers trouble-free operation over a long period of time.
  • Easy positioning mechanism to reduce installation time for mounting and dismounting

  Specifications

Item

Specification

Carrier type

SEMI Compliance FOUP

Dimension

472(W) x 493(D) x 1,344.5(H)

Weight

60kg

FOUP Door

Opening Time

Without Mapping

≤ 12 sec

With Mapping

≤ 15 sec

MCBF (Mean Cycles Between Failures

≥ 100,000 Cycles

Cleanliness

ISO Class1 compatible

Electrical interface

+24V DC

Utility requirement

Vacuum

-70 kPa

CDA

0.5 MPa

Option

RF ID Reader, PIO Sensor


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