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Vacuum Cluster System

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Wafer Transfer System

OPTIMA Series

OPTIMA 시리즈는 우수한 성능과 높은 웨이퍼 처리량에 최적화되어 있습니다. 특히 ALD와 같은 장시간 공정 Time을 필요로 하는 공정 장비를 구성하는데 적합합니다.

  Features

  • High throughput available with dual transfer module for various processes
  • Suitable for long process time such as ALD
  • Field proven vacuum robot with AWC feature

  Specifications

  • Wafer Placement repeatability : ≤ ± 0.1 mm
  • Base Pressure : 10-3Torr(Available for 10-7Torr)
  • Particle  : ≤ 5 ea @40nm
  • UPEH :   152   wafers/h
  • Compatibility of SEMI / MESC
  • Satisfaction of CE Mark and SEMI S2

코스텍시스템(주) 경기도 평택시 서탄면 방꼬지길 231

TEL : 031-646-1500  FAX : 031-646-1515

Email : Sales@kosteks.com

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