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Vacuum Cluster System

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Wafer Transfer System

MAXIMA Series

MAXIMA ์‹œ๋ฆฌ์ฆˆ๋Š” ์šฐ์ˆ˜ํ•œ ์„ฑ๋Šฅ๊ณผ ๋†’์€ ์ฒ˜๋ฆฌ๋Ÿ‰์„ ์œ„ํ•˜์—ฌ ์„ค๊ณ„๋˜์—ˆ์œผ๋ฉฐ, ํŠนํ™”๋œ ๋‹ค์–‘ํ•œ Option์„ ์ œ๊ณตํ•ฉ๋‹ˆ๋‹ค. ์ตœ๋Œ€ 6๊ฐœ์˜ ํ”„๋กœ์„ธ์Šค ๋ชจ๋“ˆ์„ ๊ตฌ์„ฑํ•  ์ˆ˜ ์žˆ์–ด ํŠนํžˆ, ๊ณ  ์ง„๊ณต ๋ฐ ๊ณ ์˜จ ๊ณต์ •์„ ํ•„์š”๋กœ ํ•˜๋Š” ๊ณต์ • ์žฅ๋น„์˜ ์ƒ์‚ฐ์„ฑ์„ ํฌ๊ฒŒ ํ–ฅ์ƒ์‹œํ‚ฌ ์ˆ˜ ์žˆ์Šต๋‹ˆ๋‹ค.

  Features

  • Providing up to 8 sided transfer chamber
  • 2 slotted LL or  25 wafers batch LL
  • Available to apply pre-heat and post cool in LL chamber (option)  
  • Field proven vacuum robot with AWC feature

  Specifications

  • Wafer Placement repeatability : ≤ ± 0.1 mm
  • Base Pressure : 10-3Torr(Available for 10-8Torr)
  • Particle  : ≤ 5 ea @40nm
  • UPEH :   148   wafers/hr
  • SEMI / MESC Compatible
  • CE Mark and SEMI S2 Satisfied

์ฝ”์Šคํ…์‹œ์Šคํ…œ(์ฃผ) ๊ฒฝ๊ธฐ๋„ ํ‰ํƒ์‹œ ์„œํƒ„๋ฉด ๋ฐฉ๊ผฌ์ง€๊ธธ 231

TEL : 031-646-1500  FAX : 031-646-1515

Email : Sales@kosteks.com

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