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Load Port Module

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Wafer Transfer System

LOAD PORT MODULE

LPM์€ ๋ฐ˜๋„์ฒด ์›จ์ดํผ๊ฐ€ ๋“ค์–ด ์žˆ๋Š” FOUP(Front Opening Universal Pod)์˜ ๋„์–ด๋ฅผ ์ž๋™์œผ๋กœ ๊ฐœํํ•˜๊ณ  ์›จ์ดํผ๊ฐ€ ๋ฐ˜์†ก๋  ์ˆ˜ ์žˆ๋„๋ก ํ•˜๋Š” ์žฅ์น˜์ž…๋‹ˆ๋‹ค. ์ ์šฉ ์‚ฌ์–‘ ๋ฐ ์›จ์ดํผ ์ฒ˜๋ฆฌ๋Ÿ‰์— ๋”ฐ๋ผ ์ฑ„ํƒํ•  ์ˆ˜๋Ÿ‰์„ ๊ฒฐ์ •ํ•˜๋ฉฐ FOUP ๋‚ด๋ถ€์˜ ์˜ค์—ผ ๋ฐฉ์ง€๋ฅผ ์œ„ํ•œ N2 Purge LPM์„ ๊ตฌ๋น„ํ•˜๊ณ  ์žˆ์Šต๋‹ˆ๋‹ค.


  • High-reliability design delivers trouble-free operation over a long period of time.
  • Easy positioning mechanism to reduce installation time for mounting and dismounting
  • N2 Purging into the FOUP
  • Compatible with extra N2 Purge/Stage Kit  (Easy Maintenance) 



์ฝ”์Šคํ…์‹œ์Šคํ…œ(์ฃผ) ๊ฒฝ๊ธฐ๋„ ํ‰ํƒ์‹œ ์„œํƒ„๋ฉด ๋ฐฉ๊ผฌ์ง€๊ธธ 231

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