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Home  >  ์ œํ’ˆ์†Œ๊ฐœ  >  Semiconductor Equipment  >  Wafer Transfer System  >  Vacuum Cluster System  >  Twinstar Series > Specialized Load Lock 

Wafer Transfer System


์ œํ’ˆ์†Œ๊ฐœ


 Specialized LoadLock

2์ธต  Load Lock์€ ์›จ์ดํผ ์ฒ˜๋ฆฌ๋Šฅ๋ ฅ์„ ๊ทน๋Œ€ํ™”ํ•  ์ˆ˜ ์žˆ์Šต๋‹ˆ๋‹ค.

  Features

  • Stacked LL Chamber
  • Small Chamber Volume  -  High throughput
  • Slit valve with particle free L motion

 Specifications

  • Chamber : Al 5083
  • Top Lid : Al 508310
  • Slot  : 8 slots (Upper 4 slots, Lower 4 slots) / Ceramic / 10mm pitch
  • Door Valve : L-Motion / AL6061, Viton O-ring

 Pre-heating/cooling Plate(option)

Load Lock ์ฑ”๋ฒ„์— ์˜ˆ์—ด/๋ƒ‰๊ฐ ๊ธฐ๋Šฅ์„ ์ถ”๊ฐ€ํ•˜์—ฌ ์›จ์ดํผ ์ฒ˜๋ฆฌ๋Ÿ‰์„ ํฌ๊ฒŒ ํ–ฅ์ƒ์‹œ์ผฐ์Šต๋‹ˆ๋‹ค.

   Cooling Module

  • PCW Circulation
  • Cooling Plate with Ceramic Ball
  • Cylinder up/down Motion
  • Easy Maintenance

   Wafer Pre-heating in LL

  • Max Temp 300°C
  • Heating Chuck module
  • Pin up/down Motion

 Photo Ionizer removing static electricity(option)

์›จ์ดํผ๊ฐ€ Load Lock์— ๋จธ๋ฌด๋Š” ๋™์•ˆ Soft X-ray์— ์˜ํ•˜์—ฌ ์ด์˜จํ™”๋œ N2 ๊ฐ€์Šค๋ฅผ ์›จ์ดํผ ํ‘œ๋ฉด์— ๋ถ„์‚ฌํ•˜์—ฌ ์›จ์ดํผ์˜ ์ •์ „๊ธฐ๋ฅผ ์ œ๊ฑฐํ•จ์œผ๋กœ์จ  ์›จ์ดํผ ํ‘œ๋ฉด์— Particle์ด ๋ถ€์ฐฉ๋˜๋Š” ๊ฒƒ์„ ๋ฐฉ์ง€ํ•  ์ˆ˜ ์žˆ์Šต๋‹ˆ๋‹ค.


์ฝ”์Šคํ…์‹œ์Šคํ…œ(์ฃผ) ๊ฒฝ๊ธฐ๋„ ํ‰ํƒ์‹œ ์„œํƒ„๋ฉด ๋ฐฉ๊ผฌ์ง€๊ธธ 231

TEL : 031-646-1500  FAX : 031-646-1515

Email : Sales@kosteks.com

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