Item

Specification

General

MASK size

Customizing available

Carrier

3 to 5 slots

Color 

White : EX4511(S)-WH0009

Load port

Foup for MASK(2 FOUP)

Light

LED

Display Monitor

LCD Touch Monitor

Environment

Internal Pressure monitoring

Diff. pressure display, Interlock

Operation Environment

Class 1 clean room

Particle Performance

≤ 2.0ea / ≤4.0nm

Filter Material

PTFE ULPA Filter

Filter Pressure Drop(Pa)

<93.2 (Velocity based) 

Safety

Signal Tower Lamp

(Red/Green/Yellow) + Buzzer

EMO 

3 EA (Front / Left / Right)

Front Safety type

Light curtain

Utility

CDA

0.5～0.6[MPa]

Vacuum

- 80 Kpa or less

Power 

3Φ AC200～230(V)±(10％) 30(A) 50/60(Hz

Item

Specification

General

Wafer size

300mm Silicon Wafer

Carrier

25 Wafers FOUP

Color 

White : EX4511(S)-WH0009

Load port

300mm LPM(3 FOUP)

Light

LED

Display Monitor

LCD Touch Monitor

Environment

Internal Pressure monitoring

Diff. pressure display, Interlock

Operation Environment

Class 1 clean room

Particle Performance

≤ 2.0ea / ≤4.0nm

Filter Material

PTFE ULPA Filter

(Chemical Filter)

Filter Pressure Drop(Pa)

<93.2 (Velocity based) 

Safety

Signal Tower Lamp

(Red/Green/Yellow) + Buzzer

EMO 

3 EA (Front / Left / Right)

Light curtain

Dual Protection Bar

Utility

CDA

3/8”, ≥ 5 kgf/㎠

Vacuum

≤ - 80 Kpa

Power 

208 VAC, 30A + GND