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Vacuum Cluster System

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Wafer Transfer System


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 Specially Designed for Cleanness & Ultra High Vacuum

  • Moisture filter installed in the venting line to reduce moisture  
  • Dual O-ring applied to minimize leakages
  • Tungsten halogen Lamp installed to remove moisture quickly

์ฝ”์Šคํ…์‹œ์Šคํ…œ(์ฃผ) ๊ฒฝ๊ธฐ๋„ ํ‰ํƒ์‹œ ์„œํƒ„๋ฉด ๋ฐฉ๊ผฌ์ง€๊ธธ 231

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